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Microelectromechanical systems
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#	Item
911	PDF Document Add to Reading List Source URL: www.seconsemi.com Language: English - Date: 2004-10-29 08:46:33 Technology Etching Wafer Thermal oxidation Isotropic etching LOCOS Microelectromechanical systems Deep reactive-ion etching Materials science Microtechnology Semiconductor device fabrication
912	PDF Document Add to Reading List Source URL: www.psemi.com Language: English - Date: 2013-01-07 11:08:49 Thin film deposition Silicon on sapphire Compound semiconductors Inorganic compounds Silicon Silicon on insulator Microelectromechanical systems Chemistry Materials science Semiconductor device fabrication
913	PDF Document Add to Reading List Source URL: www.math.udel.edu Language: English - Date: 2005-09-02 10:02:54 Electromagnetism Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Applied mathematics Nanoelectromechanical system Courant Institute of Mathematical Sciences Society for Industrial and Applied Mathematics Materials science Microtechnology Academia
914	PDF Document Add to Reading List Source URL: www.mariobirkholz.de Language: English - Date: 2011-05-22 12:04:03 Microtechnology Transducers Physics Measuring instruments Mechanical engineering Microelectromechanical systems Microfabrication Wafer Sensor Semiconductor device fabrication Technology Materials science
915	PDF Document Add to Reading List Source URL: www.lbl.gov Language: English - Date: 2013-03-29 15:11:54 Nanotechnology Emerging technologies Technology Electromagnetism Nanowire Nanoelectromechanical system Microelectromechanical systems Nanotube nanomotor Carbon nanotubes in photovoltaics Carbon nanotubes Nanoelectronics Materials science
916	PDF Document Add to Reading List Source URL: www.invensense.com Language: English - Date: 2012-08-30 17:17:56 Gyroscopes Sensors Vibrating structure gyroscope Microelectromechanical systems Accelerometer Rate sensor Micro-Opto-Electro-Mechanical Systems Rate gyro Inertial navigation system Technology Microtechnology Engineering
917	PDF Document Add to Reading List Source URL: www.eitc.org Language: English - Date: 2011-12-02 11:48:57 Electrical engineering Mechanical engineering Microelectromechanical systems Transducers Hong Kong Applied Science and Technology Research Institute Dallas Industrial Technology Research Institute Nanotechnology Geography of Texas Microtechnology Texas
918	PDF Document Add to Reading List Source URL: www.ieee-uffc.org Language: English - Date: 2008-12-29 17:55:23 Technology Capacitive Micromachined Ultrasonic Transducers Microelectromechanical systems Etching Plasma-enhanced chemical vapor deposition Chemical vapor deposition Polycrystalline silicon Strain engineering Chemical-mechanical planarization Semiconductor device fabrication Materials science Chemistry
919	PDF Document Add to Reading List Source URL: www.electrochem.org Language: English - Date: 2012-04-20 11:04:24 Materials science Engineering Gas sensors Transducers Measuring instruments Hydrogen sensor Microelectromechanical systems Biosensor Machine olfaction Sensors Technology Microtechnology
920	PDF Document Add to Reading List Source URL: www.electrochem.org Language: English - Date: 2012-04-20 11:04:18 Superhard materials Diamond Abrasives Semiconductor device fabrication Thin film deposition Synthetic diamond Chemical vapor deposition of diamond Chemical vapor deposition Microelectromechanical systems Chemistry Manufacturing Matter

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